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High Vacuum Dry Screw Pump Stainless Steel Aluminum Alloy For Semiconductor Electronics

LG Series Dry Oil-Free Screw Vacuum Pump The LG Series Dry Oil-Free Screw Vacuum Pump operates using a pair of precisely engineered parallel screws that rotate simultaneously in opposite directions. This mechanism creates a sequence of tightly sealed chambers which continuously transport gas through ...
Product Details
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High Vacuum dry screw pump

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Stainless Steel dry screw pump

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Aluminum Alloy screw vacuum

Voltage: Customized
Motorpower: 1.5 KW To 75 KW
Material: Stainless Steel / Aluminum Alloy
Pumping Speed: 5 To 7200 M³/h
Operatingtemperature: -20°C To 80°C
Ultimate Pressure: ≤5 Pa
Vacuum Range: High Vacuum
Productname: Dry Screw Vacuum Pump

Basic Properties

Brand Name: KN
Certification: CE,ISO
Model Number: LG

Trading Properties

Minimum Order Quantity: 1
Price: ≥2000 USD
Payment Terms: TT
Supply Ability: ≥50000
Product Description
LG Series Dry Oil-Free Screw Vacuum Pump
The LG Series Dry Oil-Free Screw Vacuum Pump operates using a pair of precisely engineered parallel screws that rotate simultaneously in opposite directions. This mechanism creates a sequence of tightly sealed chambers which continuously transport gas through the pump for suction and exhaust purposes.
Key Features
  • Oil-free operation ensures clean vacuum process without lubrication requirements
  • Corrosion-resistant materials for handling condensable gases and mildly corrosive substances
  • Automatic purging system for enhanced performance
  • Dynamically balanced rotor for reduced vibration and minimal noise
  • Premium-quality bearings for steady operation
  • Short, unobstructed pump cavity for efficient exhaust flow
Ideal for semiconductor and electronics manufacturing applications including oil and gas recovery, solvent recovery, and special gas management.
Technical Specifications
Air Cooled Series Vacuum Pump Basic Parameters
Model Pumping Speed (m³/h) Pumping Speed (L/s) Pressure Limit (Pa) Power (kW) Revolution (rpm) Inlet Caliber Outlet Caliber Pump Head Weight (kg) Noise (dB(A)) Overall Dimensions (L*W*H) mm
LG-5 5 1.5 ≤5 0.37 2720 KF14 KF14 14 ≤68 510*200*260
LG-10 10 3 ≤5 0.75 2840 KF16 KF16 30 ≤68 620*280*300
LG-20 20 6 ≤5 1.1 2840 KF25 KF25 45 ≤70 770*350*370
LG-30 30 9 ≤10 1.5 2850 KF40 KF40 55 ≤71 920*440*450
LG-50 50 15 ≤10 2.2 2850 KF40 KF40 65 ≤72 1080*500*550
LG-70 70 20 ≤30 3 2870 KF50 KF40 72 ≤72 1100*580*600
LG-80 80 23 ≤30 3 2870 KF50 KF40 78 ≤72 1180*660*680
LG-90 90 25 ≤30 4 2890 KF63 KF50 85 ≤73 1250*720*750
LG-100 100 30 ≤30 4 2890 KF63 KF50 93 ≤73 1310*750*810
Applications
  • Oil and gas recovery systems
  • Solvent reclamation processes
  • Specialty gas recovery
  • Vacuum coating applications
  • Biomedical and food processing
  • Single crystal furnace operations
  • Vacuum molding and smelting
  • Photovoltaic device fabrication
  • Semiconductor synthesis and manufacturing
Support and Services
Our Dry Screw Vacuum Pump is backed by comprehensive technical support including expert installation guidance, routine maintenance schedules, and prompt troubleshooting assistance. Our skilled technicians provide on-site service, parts replacement, and system upgrades tailored to your operational needs.
We offer detailed user manuals and training sessions to ensure efficient operation and maintenance of your vacuum pump system.
Packing and Shipping
Each unit is securely packaged in custom-fitted foam molds within sturdy, double-walled cardboard boxes to prevent damage during transit. We use reliable carriers with tracking options and provide all necessary documentation including user manuals and warranty information.
Our logistics team coordinates air, sea, or land freight options to meet international shipping standards and ensure safe delivery worldwide.
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